Chip ejector

A chip ejector comprising:

• a holder extending along a first direction and a second direction perpendicular to the first direction and having a plurality of holes passing therethrough along a vertical direction;
• a mount tape disposed on an upper surface of the holder;
• a chip disposed on an upper surface of the mount tape;
• a picker unit disposed above the chip and vacuum-suctioning the chip to separate the chip from the mount tape;
• an air pin inserted into at least one hole among the plurality of holes and configured to provide pressurized air to a lower surface of the mount tape;
• an air inlet pipe on which the air pin is mounted to form a plurality of paths through which the pressurized air flows;
• a pressurization source providing the pressurized air to the air inlet pipe;
• a chamber disposed below the holder and forming an inner space;
• and
• a vacuum unit configured to provide vacuum pressure to the lower surface of the mount tape.

A chip ejector comprising:

• a chamber forming an inner space;
• a holder disposed above the chamber, and having a plurality of holes passing therethrough along a vertical direction;
• a mount tape disposed on an upper surface of the holder;
• a chip disposed on an upper surface of the mount tape;
• a picker unit disposed above the chip and vacuum-suctioning the chip to separate the chip from the mount tape;
• a pressurization unit providing pressurized air to the mount tape disposed on the holder;
• and
• a vacuum unit providing vacuum pressure to a lower surface of the mount tape,
• wherein the pressurization unit comprises:
• an air pin inserted into at least one hole among the plurality of holes along the vertical direction and having a discharge hole extending in the vertical direction;
• an air inlet pipe on which the air pin is mounted to form a plurality of paths through which the pressurized air flows;
• a pressurization source providing the pressurized air to the air inlet pipe;
• and
• a pressurization valve connected to the pressurization source and regulating an amount of the pressurized air,
• wherein a hole, into which the air pin is not inserted among the plurality of holes corresponding to an area of the chamber, is a suction hole,
• wherein the vacuum unit comprises:
• a vacuum source generating the vacuum pressure in the suction hole and the inner space of the chamber connected to the suction hole;
• and
• a vacuum valve connected to the vacuum source and regulating a level of the vacuum pressure.