Ceramic heater

Abstract

An embodiment of the present disclosure provides a ceramic heater including a plate having a heat-generation body and a first passage, a shaft having a hollow, and a thermocouple inserted into the first passage, wherein the first passage includes an A-th passage part parallel with a first surface of the plate and a B-th passage part inclined with respect to the first surface. Furthermore, an embodiment of the present disclosure provides a ceramic heater including a plate having a heat-generation body and a first passage, a shaft having a hollow, and a thermocouple inserted into the first passage, wherein the first passage includes an A-th passage part parallel with an upper surface of the plate, and a C-th passage part disposed between the A-th passage part and an upper end portion of the shaft and gradually narrowing from the upper end portion of the shaft to the A-th passage.

Dependencies are inferred from the claim text.