Semiconductor apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorsDongkyun KIM, Sungchan KANG, Daehyuk SON, Hotaik LEE, Seogwoo HONG
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Abstract
A semiconductor apparatus includes a semiconductor chip including a semiconductor integrated circuit, a cooling channel at least partially in the semiconductor chip and including a fine pattern on at least a portion of a wall surface of the cooling channel, the fine pattern configured to generate a capillary pressure that induces a flow of a liquid coolant, and a temperature controller configured to control a supply temperature of the liquid coolant supplied to the cooling channel.
Claims20
A semiconductor apparatus comprising:
- a semiconductor chip comprising a semiconductor integrated circuit;
- a cooling channel at least partially in the semiconductor chip and comprising a fine pattern on at least a portion of a wall surface of the cooling channel, the fine pattern configured to generate a capillary pressure that induces a flow of a liquid coolant;
- and
- a temperature controller configured to control a supply temperature of the liquid coolant supplied to the cooling channel.
A semiconductor apparatus comprising:
- a semiconductor chip comprising a semiconductor integrated circuit;
- a plurality of cooling channels at least partially in the semiconductor chip, each of the plurality of cooling channels comprising a fine pattern on at least a portion of a wall surface of a respective cooling channel of the plurality of cooling channels, each of the fine patterns being configured to generate a capillary pressure that induces a flow of a liquid coolant;
- and
- a temperature controller configured to control a supply temperature of the liquid coolant supplied to the plurality of cooling channels.
A method of controlling a temperature of a liquid coolant supplied to a cooling channel in a semiconductor chip, the cooling channel comprising a fine pattern configured to generate a capillary pressure that induces a flow of the liquid coolant, the method comprising:
- detecting, by a first control element of a temperature controller, the temperature of the liquid coolant supplied to the cooling channel;
- and
- controlling, by the temperature controller, the temperature of the liquid coolant supplied to the cooling channel.
Dependencies are inferred from the claim text.