Method for producing structure having phase-separated structure

A method for improving misalignment of a cylinder structure and alignment mark formation, the method comprising:

• forming a layer including a block copolymer and having a thickness t (nm) on a substrate using a resin composition containing the block copolymer;
• and
• phase separating the layer into a cylinder structure,
• wherein the thickness t is set such that a relationship between the thickness t and period L0 (nm) of the block copolymer satisfies (2L0+(30.5/2) L0×n)×0.9≤t≤(2L0+(30.5/2) L0×n)×1.1, wherein n is an integer between 0 and 3 inclusive.

A method for producing a structure having a phase-separated structure, the method comprising:

• forming a layer including a block copolymer and having a thickness t (nm) on a substrate using a resin composition containing the block copolymer;
• and
• phase separating the layer into a lamellar structure,
• wherein the thickness t is set such that a relationship between the thickness t and a period L0 (nm) of the block copolymer satisfies (1.5L0+0.5L0×m)×0.95≤t≤(1.5L0+0.5L0×m)×1.05, wherein m is an integer between 0 and 5 inclusive.

A method for improving line roughness and alignment mark formation, the method comprising:

• forming a layer including a block copolymer and having a thickness t (nm) on a substrate using a resin composition containing the block copolymer;
• and
• of phase separating the layer into a lamellar structure,
• wherein the thickness t is set such that a relationship between the thickness t and a period L0 (nm) of the block copolymer satisfies (1.5L0+0.5L0×m)×0.95≤t≤(1.5L0+0.5L0×m)×1.05 (b, wherein m is an integer between 0 and 5 inclusive.