Silicon carbide epitaxial substrate

A silicon carbide epitaxial substrate comprising:

• a silicon carbide substrate having a first main surface;
• and
• a silicon carbide epitaxial layer provided on the first main surface, wherein
• the silicon carbide epitaxial substrate includes
• one or more threading screw dislocations in the silicon carbide substrate,
• one or more threading edge dislocations in the silicon carbide substrate, and
• one or more blue light-emitting defects in the silicon carbide epitaxial layer,
• the silicon carbide epitaxial layer has a second main surface located opposite to an interface between the silicon carbide substrate and the silicon carbide epitaxial layer,
• the one or more blue light-emitting defects are exposed at the second main surface,
• when photoluminescence light generated from the one or more blue light-emitting defects by irradiation of the one or more blue light-emitting defects with excitation light is represented in HSV color space, H is 180° or more and 230° or less, S is 60 or more and 170 or less, and V is 190 or more and 255 or less,
• when the first main surface is divided into a plurality of square regions each having a side length of 10 mm, the plurality of square regions include a plurality of first outer circumferential regions located at an outermost circumference of the plurality of square regions, and a plurality of second outer circumferential regions in contact with the plurality of first outer circumferential regions,
• an average value of LTIR of the silicon carbide substrate in the plurality of first outer circumferential regions and the plurality of second outer circumferential regions is 0.6 μm or less, and
• when an area density of the one or more threading screw dislocations in the first main surface is a first area density, an area density of the one or more threading edge dislocations in the first main surface is a second area density, and an area density of the one or more blue light-emitting defects in the second main surface is a third area density, a ratio of the third area density to a sum of the first area density and the second area density is 0.03% or less.