US 2025/0096147 A1Published application

Overlay mark

AssigneeMacronix International Co., Ltd.

InventorsChiung Jung Tu, Chih-Hao Huang, Yu-Lin Liu, Chin-Cheng Yang

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Abstract

An overlay mark includes a previous layer mark and a current layer mark. The previous layer mark includes a plurality of first work zones. Each first working zone includes a first sub-region and a second sub-region, wherein the first sub-region is closer to a center point of the previous layer mark than the second sub-region. The previous layer mark includes a first mark and an auxiliary mark respectively in the first sub-region and the second sub-region of each first working zone. The current layer mark includes a plurality of second working zones. Each second working zone includes a first sub-region and a second sub-region. The current layer mark includes a second mark disposed in the second sub-region of each second working zone. The overlay mark may be applied in the process of manufacturing a 3D NAND flash memory with high capacity and high performance.

Claims20

Dependent claims

An overlay mark, comprising:

a previous layer mark, comprising a plurality of first work zones, each first work zone comprising a first sub-region and a second sub-region, the first sub-region being closer to a center point of the previous layer mark than the second sub-region, and the previous layer mark comprising:
a first mark, disposed in the first sub-region of each first work zone;
and
an auxiliary mark, disposed in the second sub-region of each first work zone;
and
a current layer mark, comprising a plurality of second work zones, each second work zone comprising a first sub-region and a second sub-region, wherein the first sub-region of the current layer mark overlaps with the first sub-region of the previous layer mark, the second sub-region of the current layer mark overlaps with the second sub-region of the previous layer mark, and the current layer mark comprises:
a second mark, disposed in the second sub-region of each second work zone.

4 more elements

Dependencies are inferred from the claim text.