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US 2025/0096124 A1Published application
Horizontal antifuse
AssigneeInternational Business Machines Corporation
InventorsAshim Dutta, Chih-Chao Yang, Shravana Kumar Katakam
Life of this patent
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Abstract
An antifuse structure including a first fuse conductor, a second fuse conductor in the same metallization level as the second fuse conductor, and a tapered fuse dielectric between and separating the first fuse conductor from the second fuse conductor.
Claims20
An antifuse structure comprising:
- a first fuse conductor;
- a second fuse conductor in the same metallization level as the second fuse conductor;
- and
- a tapered fuse dielectric between and separating the first fuse conductor from the second fuse conductor.
1 more element
An antifuse structure comprising:
- a first fuse conductor;
- a second fuse conductor in the same metallization level as the second fuse conductor;
- and
- a tapered fuse dielectric between and separating the first fuse conductor from the second fuse conductor, wherein an uppermost surface of the fuse dielectric is substantially flush with an uppermost surface of each of the first and second fuse conductors.
1 more element
An antifuse structure comprising:
- a first fuse conductor;
- a second fuse conductor, wherein bottommost surfaces of each of the first and second fuse conductors are substantially flush with one another;
- and
- a tapered fuse dielectric between and separating the first fuse conductor from the second fuse conductor, wherein an uppermost surface of the fuse dielectric is substantially flush with an uppermost surface of each of the first and second fuse conductors.
1 more element
Dependencies are inferred from the claim text.