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US 2025/0096026 A1Published application
Substrate fixing device
AssigneeShinko Electric Industries Co., Ltd.
InventorsKeita Sato, Riku Nishikawa
Life of this patent
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Abstract
A substrate fixing device includes a ceramic base plate, a ceramic electrostatic chuck having a mounting surface on which a target object to be adsorbed is mounted, and an adhesion layer bonding the base plate and the electrostatic chuck.
Claims10
A substrate fixing device comprising:
- a ceramic base plate;
- a ceramic electrostatic chuck having a mounting surface on which a target object to be adsorbed is mounted;
- and
- an adhesion layer bonding the base plate and the electrostatic chuck.
1 more element
Dependencies are inferred from the claim text.