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US 2025/0093769 A1Published application
Mask quality management system
AssigneeSamsung Display Co., Ltd.
InventorsSUNGMIN HUR, HYENG-WOO CHO
Life of this patent
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Abstract
A mask quality management system includes a mask including a mask frame and a plurality of mask sheets, wherein the mask sheets are fixed to an upper surface of the mask frame and disposed to be spaced apart from each other, a stage on which the mask is seated, and a first module disposed on the stage and measuring a sagging degree of the mask sheet from the mask frame by irradiating an intense light to the mask.
Claims20
A mask quality management system comprising:
- a mask including:
- a mask frame;
- and
- a plurality of mask sheets fixed to an upper surface of the mask frame and spaced apart from each other;
- a stage on which a mask of the plurality of mask sheets is seated;
- and
- a first module disposed on the stage and measuring a sagging degree of the mask sheet from the mask frame by irradiating an intense light to the mask.
4 more elements
A mask quality management system comprising:
- a mask including:
- a mask frame;
- and
- a plurality of mask sheets fixed to an upper surface of the mask frame and spaced apart from each other;
- a stage on which a mask of the plurality of mask sheets is seated;
- and
- a second module which is disposed on the stage, provides a gas to the mask.
4 more elements
Dependencies are inferred from the claim text.