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US 2025/0084528 A1Published application
Heat transfer management in substrate support systems
AssigneeApplied Materials, Inc.
InventorArvinder ManmohanSingh Chadha
Life of this patent
Estimating the term…
Abstract
A method includes: identifying property data associated with a substrate support system; identifying target performance data associated with the substrate support system; and causing, based on the property data and the target performance data, heat transfer management of the substrate support system.
Claims20
A method comprising:
- identifying property data associated with a substrate support system;
- identifying target performance data associated with the substrate support system;
- and
- causing, based on the property data and the target performance data, heat transfer management of the substrate support system.
1 more element
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to perform operations comprising:
- identifying property data associated with a substrate support system;
- identifying target performance data associated with the substrate support system;
- and
- causing, based on the property data and the target performance data, performance of one or more material operations on the substrate support system.
1 more element
A system comprising:
- a memory;
- a processing device coupled to the memory, the processing device to:
- identify property data associated with a substrate support system;
- identify target performance data associated with the substrate support system;
- and
- cause, based on the property data and the target performance data, performance of one or more material operations on the substrate support system.
3 more elements
Dependencies are inferred from the claim text.