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US 2025/0060662 A1Published application
An euv pellicle
AssigneeImec Vzw
InventorsMarina TIMMERMANS, Ivan POLLENTIER, Cedric HUYGHEBAERT, Emily GALLAGHER
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Abstract
According to an aspect there is provided an EUV pellicle comprising: a pellicle frame; and a pellicle membrane mounted on the pellicle frame and comprising a film of bundles of CNTs, wherein within any 2 μm×2 μm region of the film: an average number of CNTs per bundle is at least 5, an average bundle diameter is in a range from 6 to 16 nm, an average areal density is in a range from 0.4 to 6 μg/cm2, an inter-bundle spacing is 250 nm or less, and a number of walls per CNT is 6 or less.
Claims15
An EUV pellicle comprising:
- a pellicle frame;
- and
- a pellicle membrane mounted on the pellicle frame and comprising a film of bundles of carbon nanotubes, CNTs, wherein within any 2 μm×2 μm region of the film:
- an average number of CNTs per bundle is at least 5,
- an average bundle diameter is in a range from 6 to 16 nm,
- an average areal density is in a range from 0.4 to 6 μg/cm2
- an inter-bundle spacing is 250 nm or less, and
- a number of walls per CNT is 6 or less.
5 more elements
Dependencies are inferred from the claim text.