Semiconductor device and semiconductor device manufacturing method
AssigneeTokyo Electron Limited
InventorsTetsu OHTOU, Tomonari YAMAMOTO, Koji WATANABE
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AssigneeTokyo Electron Limited
InventorsTetsu OHTOU, Tomonari YAMAMOTO, Koji WATANABE
Estimating the term…
[Object] A technique for increasing decoupling capacitance between a power supply line and a ground line in a semiconductor device is provided. [Solution] A semiconductor device according to the present disclosure includes a substrate having a first main surface and a second main surface, a plurality of elements formed on the first main surface of the substrate or above the first main surface, at least one first power supply line electrically connected to at least one of the plurality of elements, disposed in a first layer provided above the first main surface of the substrate, and having an upper surface, a first side surface continuously formed from the upper surface, and a second side surface that is opposite to the first side surface and continuously formed from the upper surface, and at least one second power supply line disposed in the first layer and a second layer above the first layer and disposed from the second layer to the first layer to cover the upper surface, the first side surface, and the second side surface in a part of the at least one first power supply line.
A semiconductor device including:
A semiconductor device including:
A semiconductor device manufacturing method comprising:
Dependencies are inferred from the claim text.