Integrated exhaust duct and substrate processing apparatus

An integrated exhaust duct comprising:

• an integrated duct body having a plurality of exhaust regions and an exhaust hole communicating with the plurality of exhaust regions;
• and
• a hole partition wall disposed inside the exhaust hole to divide the exhaust hole so that a plurality of exhaust regions are blocked from communicating with each other by passing through the exhaust hole,
• wherein the exhaust region includes a plurality of duct connection portions to which a plurality of exhaust ducts are connected, and a common exhaust path formed from the plurality of duct connection portions to the exhaust hole, and
• the duct connection portion has two outlets formed in opposite directions, and the two exhaust holes are disposed to be spaced apart from each other, wherein the two common exhaust paths for connecting the two outlets and the two exhaust holes are disposed to correspond to each other with the duct connection portion interposed therebetween.

A substrate processing apparatus comprising:

• a plurality of process chambers in which processes are performed on each substrate;
• a plurality of exhaust ducts connected to a plurality of exhaust lines formed in the plurality of process chambers;
• and
• an integrated exhaust duct connected to the plurality of exhaust ducts,
• wherein the integrated exhaust duct comprises:
• an integrated duct body having a plurality of exhaust regions and an exhaust hole communicating with the plurality of exhaust regions;
• and
• a hole partition wall disposed inside the exhaust hole to divide the exhaust hole so that the plurality of exhaust regions are blocked from communicating with each other passing through the exhaust hole,
• wherein the exhaust region includes a plurality of duct connection portions to which a plurality of exhaust ducts are connected, and a common exhaust path formed from the plurality of duct connection portions to the exhaust hole.