Method, system and apparatus for substrate handling and cooling

A substrate transfer method, comprising:

• at a chamber arrangement including a transfer chamber opening to a first gate valve and a second gate valve;
• a cooling plate comprising a top surface having one or more open recesses extending inward from a perimeter of the cooling plate toward a center point of the cooling plate;
• an indexer radially offset from the cooling plate comprising an actuator assembly configured to translate along a vertical axis to a first position and a second position;
• and a crossbeam cantilevered and extending from the actuator assembly along a horizontal axis with respect to the actuator assembly;
• a plurality of substrate handling members coupled to the crossbeam;
• a) moving the indexer to a first position and coupling the plurality of substrate handling members into corresponding open recesses;
• b) opening the first gate valve;
• c) inserting an unprocessed substrate through the open first gate valve and positioning the unprocessed substrate on an upper substrate transfer arrangement;
• d) moving the indexer to a second position;
• e) closing the first gate valve;
• f) opening the second gate valve;
• g) inserting a processed substrate through the open second gate valve and positioning the processed substrate on the lower substrate transfer arrangement;
• h) moving the indexer to the first position and coupling the one or more substrate handling members into the corresponding open recesses to cool the processed substrate;
• i) removing the unprocessed substrate from the upper substrate transfer arrangement through the open second gate valve;
• j) closing the second gate valve;
• k) opening first gate valve;
• l) inserting a second unprocessed substrate through the open first gate valve and positioning the second unprocessed substrate on the upper substrate transfer arrangement;
• m) moving indexer to the second position;
• and
• n) removing the cooled processed substrate from the lower substrate transfer arrangement through open first gate valve.