Pellicle for euv exposure and method for manufacturing the same

A method of manufacturing a pellicle for an extreme ultraviolet exposure, the method comprising:

• forming a graphite-containing layer on a catalyst substrate;
• surface-treating a first surface of the graphite-containing layer to form a first treatment layer;
• and
• forming a first passivation layer on the first treatment layer,
• wherein the forming of the first treatment layer includes generating at least one of a C═O bond, a C—OH bond, or an O═C—OH bond through the surface-treating of the first surface.

A pellicle for an extreme ultraviolet exposure, the pellicle comprising:

• a graphite-containing layer;
• a first treatment layer on the graphite-containing layer;
• and
• a first passivation layer on the first treatment layer,
• wherein the first passivation layer includes element “X”,
• wherein the first treatment layer is connected to the first passivation layer by a C—O—X bond, and
• wherein the element “X” includes at least one of Ti, B, Si, Zr, or Mo.