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AssigneeMorphotonics Holding B.V.
InventorsLeon Willem VELDHUIZEN, Jan Matthijs TER MEULEN, Bram Johannes TITULAER
Estimating the term…
An assembly includes a master for imprinting of micro-structures and nano-structures. The master has on its upper surface an active area with relief structure for imprinting of the micro-structures and nano-structures, and the master has a thickness dmaster. The assembly includes frame pieces arranged around and flushing along the outer circumference of the master, with the frame pieces having a thickness dframe. The thickness dframe of the frame pieces deviates from the thickness dmaster of the master by at most 250 µm. A a flexible stamp has improved alignment.
An assembly comprising:
A method of using frame pieces in an imprint process for manufacturing of a flexible stamp, comprising replicating the flexible stamp from a master having on an upper surface an active area with relief structure for imprinting of micro-structures and nano-structures, wherein the master has a thickness dmaster, arranging the frame pieces are around and flushing along an outer circumference of the master, wherein the frame pieces have a thickness dframe, wherein the thickness dframe of the frame pieces deviates from the thickness dmaster of the master by at most 250 µm and wherein master and frame pieces are mounted on a substrate carrier and are distinct from the substrate carrier.
Dependencies are inferred from the claim text.