Surface analysis method, surface analysis system, and surface analysis program

A Surface analysis system comprising at least one processor, wherein

• the at least one processor is configured to execute:
• acquiring a force curve corresponding to measurement of a sample surface by a scanning probe microscope, the scanning probe microscope performing the measurement at each of an observation point group on the sample surface by, while reciprocating a probe with respect to a stage along a X-direction along a horizontal surface, moving the probe in one direction with respect to the stage along a Y-direction which is along the horizontal surface and orthogonal to the X-direction;
• calculating a physical quantity of an organic material forming the sample surface based on the force curve, for each of the observation point group;
• and
• outputting analysis data indicating the physical quantity of each of the observation point group, and
• wherein, in the acquiring the force curve, the at least one processor is configured to acquire, for each of at least one Y-column extending along the X-direction, the force curve at each of a plurality of observation points on the Y-column, and
• wherein, in the calculating the physical quantity, the at least one processor is configured to:
• generate, for each of the at least one Y-column, a force curve matrix indicating the force curve at each of the plurality of observation points on the Y-column;
• and
• calculate, for each of the at least one Y-column, the physical quantity at each of the plurality of observation points using the force curve matrix.

A non-transitory computer-readable storage medium storing a

• surface analysis program causing a computer to execute:
• acquiring a force curve corresponding to measurement of a sample surface by a scanning probe microscope, the scanning probe microscope performing the measurement at each of an
• observation point group on the sample surface by, while reciprocating a probe with respect to a stage along a X-direction along a horizontal surface, moving the probe in one direction with respect to the stage along a Y-direction which is along the horizontal surface and orthogonal to the X-direction;
• calculating a physical quantity of an organic material forming the sample surface based on the force curve, for each of the observation point group;
• and
• outputting analysis data indicating the physical quantity of each of the observation point group, wherein
• the acquiring the force curve comprises acquiring, for each of at least one Y-column extending along the X-direction, the force curve at each of a plurality of observation points on the Y-column, and
• the calculating the physical quantity comprises:
• generating, for each of the at least one Y-column, a force curve matrix indicating the force curve at each of the plurality of observation points on the Y-column;
• and
• calculating, for each of the at least one Y-column, the physical quantity at each of the plurality of observation points using the force curve matrix.