Three-dimensional memory and fabrication method thereof
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsSimin Liu, Zongliang Huo, Wei Xu, Bo Xu, Yali Guo, Bin Chen, Siliu Zhang, Jie Su
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsSimin Liu, Zongliang Huo, Wei Xu, Bo Xu, Yali Guo, Bin Chen, Siliu Zhang, Jie Su
Estimating the term…
The present disclosure discloses a three-dimensional memory and a fabrication method thereof. The fabrication method comprises: forming a stack structure comprising alternately stacked dielectric layers and sacrificial layers; forming a gate line slit penetrating vertically penetrating the stack structure and extending in a first horizontal direction; and etching portions of the dielectric layers and the sacrificial layers adjacent to the gate line slit to form a plurality of recesses, wherein an aperture of each recess in a vertical direction is greater than a thickness of a corresponding sacrificial layer.
A method for forming a three-dimensional memory, comprising:
A three-dimensional memory device, comprising:
Dependencies are inferred from the claim text.