Back to results
US 2023/0067103 A1Published application
Substrate treatment apparatus having bowl assembly
AssigneeDeviceeng Co., Ltd.
InventorTaek Youb Lee
Life of this patent
Estimating the term…
Abstract
The present invention relates to a substrate treatment apparatus including: a substrate support assembly having a spin head onto which a substrate is seated; a fluid supply unit for supplying a fluid to the substrate; a bowl assembly having a plurality of bowls overlaid one another outwardly in a radial direction thereof to surround the substrate support assembly; and an ascending and descending unit for moving up and down the bowl assembly, wherein the bowls constituting the bowl assembly move up and down independently of one another.
Claims15
A substrate treatment apparatus comprising:
- a substrate support assembly having a spin head onto which a substrate is seated;
- a fluid supply unit for supplying a fluid to the substrate;
- a bowl assembly having a plurality of bowls overlaid one another outwardly in a radial direction thereof to surround the substrate support assembly;
- and
- an ascending and descending unit for moving up and down the bowl assembly,
- wherein the bowls constituting the bowl assembly move up and down independently of one another.
3 more elements
Dependencies are inferred from the claim text.