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US 2023/0066653 A1Published application
Reticle enclosure for lithography systems
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPei-Cheng HSU, Ta-Cheng LIEN, Hsin-Chang LEE
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Abstract
A reticle enclosure includes a base including a first surface, a cover including a second surface and disposed on the base, wherein the base and the cover form an internal space therebetween to include a reticle, and a layer of elastomer or gelatinous material disposed on at least one of the first surface and the second surface, wherein the layer of elastomer or gelatinous material is disposed between the base and the cover and contacts either the base or the cover.
Claims20
A reticle enclosure, comprising:
- a base including a first surface;
- a cover including a second surface and disposed on the base, wherein the base and the cover form an internal space therebetween to include a reticle;
- and
- a layer of elastomer or gelatinous material disposed on at least one of the first surface and the second surface, wherein the layer of elastomer or gelatinous material is disposed between the base and the cover and contacts either the base or the cover.
1 more element
A method, comprising:
- providing an outer reticle enclosure including an outer base and an outer cover,
- wherein a first layer of elastomer or gelatinous material is disposed on the outer base and a second layer of elastomer or gelatinous material is disposed on the outer cover;
- providing an inner reticle enclosure including an inner base and an inner cover, wherein a third layer of elastomer or gelatinous material is disposed on the inner base and a fourth layer of elastomer or gelatinous material is disposed on the inner cover;
- placing a reticle on the inner base;
- placing the inner cover on the inner base such that the third layer of elastomer or gelatinous material contacts the fourth layer of elastomer or gelatinous material;
- placing the inner reticle enclosure on the outer base;
- placing the outer cover on the outer base such that the first layer of elastomer or gelatinous material contacts the second layer of elastomer or gelatinous material.
4 more elements
A method, comprising:
- providing a first reticle enclosure including a first base and a first cover disposed on the first base, wherein a first layer of elastomer or gelatinous material is disposed on at least one of the first base and the first cover;
- separating the first base and the first cover;
- placing a reticle on the first base;
- and
- closing the first reticle enclosure by placing the first cover on the first base such that the first layer of elastomer or gelatinous material is disposed between the first base and the first cover and contacts either the first base or the first cover.
2 more elements
Dependencies are inferred from the claim text.