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US 2023/0066484 A1Published application
Imprint apparatus, manufacturing method for article, and computer program
AssigneeCanon Kabushiki Kaisha
InventorHirotoshi Torii
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AssigneeCanon Kabushiki Kaisha
InventorHirotoshi Torii
Estimating the term…
[Problem] The provision of an imprint apparatus that is beneficial in improving the overlap precision of a mold and resin on a substrate. [Method for Solving the Problem] In an imprint apparatus, which is configured so as to transfer a pattern from a mold onto a resin surface by pressing the mold onto the resin that is disposed on the substate surface, has a magnification correction mechanism including actuators for applying a force to a side of the mold via a contact member, and correcting the shape of a patterned portion that has been formed on the mold; and displacement members displaceable by fluid pressure for changing an initial position for starting correction of the contact members of the magnification correction unit according to a size of the mold.
An imprint apparatus configured to transfer a pattern from a mold onto resin by pressing the mold onto the resin on a surface of a substrate, the imprint apparatus having:
A manufacturing method for an article comprising:
A computer readable storage medium on which a program has been stored in which a computer executes an imprint process for an imprint apparatus configured so as to transfer a pattern of a mold to resin by pressing the mold onto the resin on a surface of a substrate, wherein the computer readable storage medium on which the program has been stored is characterized in that the computer executes an imprint method having:
Dependencies are inferred from the claim text.