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US 2022/0037187 A1Published application
Member for electrostatic chuck and electrostatic chuck
AssigneeShinko Electric Industries Co., Ltd.
InventorsMichio Horiuchi, Masaya Tsuno
Life of this patent
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Abstract
A lanthanoid element is included in a part of a material of a member for an electrostatic chuck configured to suck a target object by using an electrostatic force. When electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the member emits light in a wavelength region different from the wavelength region.
Claims10
A member for an electrostatic chuck configured to suck a target object by using an electrostatic force,
- wherein a lanthanoid element is included in a part of a material of the member, and
- wherein when electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the member emits light in a wavelength region different from the wavelength region of the electromagnetic waves.
An electrostatic chuck comprising:
- a base plate;
- a ceramic plate fixed to the base plate and configured to suck a target object by an electrostatic force that is generated as an embedded electrode is energized;
- and
- an edge ring fitted on an outer periphery of the ceramic plate,
- wherein a lanthanoid element is included in a part of a material of the edge ring, and
- wherein when electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the edge ring emits light in a wavelength region different from the wavelength region of the electromagnetic waves.
3 more elements
Dependencies are inferred from the claim text.