Dose information generation and communication for lithography manufacturing systems
AssigneeSynopsys, Inc.
InventorThomas CECIL
Life of this patent
Estimating the term…
Abstract
A method comprises receiving an integrated circuit (IC) design file and determining, by one or more processors, dose information from the IC design file. The method further comprises determining, by the one or more processors, a mask vector file from the IC design file, and converting, by the one or more processors, the dose information to a vector file format. Further, the method comprises outputting the dose information in the vector file format and the mask vector file to a mask writer device.
Claims20
A method comprising:
- receiving an integrated circuit (IC) design file;
- determining, by one or more processors, dose information from the IC design file;
- determining, by the one or more processors, a mask vector file from the IC design file;
- converting, by the one or more processors, the dose information to a vector file format;
- and
- outputting the dose information in the vector file format and the mask vector file to a mask writer device.
A lithographic system comprising:
- a memory;
- and
- a processor coupled with the memory, the processor configured to:
- receive an integrated circuit (IC) design file;
- determine dose information from the IC design file;
- determine a mask vector file from the IC design file;
- convert the dose information to a vector file format;
- and
- output the dose information in the vector file format and the mask vector file to a mask writer device.
A non-transitory computer readable medium comprising stored instructions, which when executed by a processor, cause the processor to:
- receive an integrated circuit (IC) design file;
- determine dose information from the IC design file;
- determine a mask vector file from the IC design file;
- convert the dose information to a vector file format;
- and
- output the dose information in the vector file format and the mask vector file to a mask writer device.
Dependencies are inferred from the claim text.