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AssigneeBoard of Regents, The University of Texas System
InventorsSidlgata V. Sreenivasan, Shrawan Singhal, Ovadia Abed, Lawrence Dunn, Paras Ajay, Ofodike Ezekoye
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A method for fabricating patterns on a flexible substrate in a roll-to-roll configuration. Drops of a monomer diluted in a solvent are dispensed on a substrate, where the drops spontaneously spread and merge with one another to form a liquid resist formulation. The solvent is evaporated (e.g., blanket evaporation) from the liquid resist formulation followed by selective multi-component resist film evaporation resulting in a non-uniform and substantially continuous film on the substrate. The gap between the film on the substrate and a template is closed such that the film fills the features of the template. After cross-linking the film to polymerize the film, the template is separated from the substrate thereby leaving the polymerized film on the substrate.
A method for fabricating patterns on a flexible substrate in a roll-to-roll configuration, the method comprising:
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A method for depositing a film on a flexible substrate held in a roll-to-roll configuration, the method comprising:
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Dependencies are inferred from the claim text.