Pattern forming method, photomask substrate creation method, photomask creation method, and photomask
AssigneeKioxia Corporation
InventorsYukio OPPATA, Shoji MIMOTOGI
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Abstract
A pattern forming method of an embodiment includes: obtaining a height difference of a transfer surface of a substrate to which a pattern is to be transferred; measuring a focus shift tracking amount with respect to the height difference of an exposure apparatus that performs pattern transfer; calculating a difference between the height difference and the tracking amount; forming a photomask provided with an optical path difference corresponding to the difference; and transferring a pattern to the substrate using the photomask.
Claims15
A pattern forming method comprising:
- preparing a photomask including at least a photomask substrate and a plurality of light-shielding bodies formed on the photomask substrate, the photomask including a first region having a first height, a second region having a second height different from the first height, and a slope provided between the first region and the second region and connecting the first height and the second height;
- and
- transferring a pattern to a substrate using the photomask.
A photomask creation method comprising:
- sequentially stacking a light-shielding body layer and a resist layer on a quartz substrate on which a slope is formed;
- irradiating the resist layer with an energy ray;
- and
- developing the resist layer, processing a substrate of the light-shielding body layer using the resist layer as a processing mask, and removing the resist layer after processing.
A photomask comprising at least:
- a photomask substrate;
- and
- a plurality of light-shielding bodies formed on the photomask substrate,
- the photomask including a first region having a first height, a second region having a second height different from the first height, and a slope provided between the first region and the second region and connecting the first height and the second height.
Dependencies are inferred from the claim text.