Back to results
US 2021/0278437 A1Published application
Probe and manufacturing method of probe for scanning probe microscope
AssigneeKioxia Corporation
InventorsSee Kei LEE, Mitsuo KOIKE, Masumi SAITOH
Life of this patent
Estimating the term…
Abstract
A manufacturing method of a probe according to the present embodiment is used to manufacture a probe for a scanning probe microscope. An insulating film is formed on the surface of a probe provided on a base. Metal ions are implanted into the insulating film. An electric field is applied to the insulating film to concentrate the metal ions in the insulating film at a tip of the probe and form a metallic filament in the insulating film.
Claims14
A manufacturing method of a probe used for a scanning probe measuring apparatus, the method comprising:
- forming an insulating film on a surface of a probe provided on a base;
- implanting metal ions into the insulating film;
- and
- applying an electric field to the insulating film to concentrate the metal ions in the insulating film at a tip of the probe and form a metallic filament in the insulating film.
1 more element
-19. (cancelled)
Dependencies are inferred from the claim text.