Probe chip, scan head, scanning probe microscopy device and use of a probe chip

A scan head for use in a scanning probe microscopy device for holding a probe chip for holding a probe mounted thereon,

• wherein the probe chip includes a carrier element having a probe bearing side, the probe bearing side being configured for bearing the probe to be extending therefrom as an integral or mounted part thereof, the carrier element further comprising a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device,
• wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat, wherein the longitudinal direction is defined as a direction parallel to or coinciding with a direction wherein the probe is to be extending from the probe bearing side, and wherein the lateral direction is transverse to the longitudinal direction and transverse to a thickness of the carrier element,
• wherein the carrier element, towards the probe bearing side thereof, is truncated in the lateral direction on each side of a longitudinal axis through a center of the carrier element, wherein the truncation is a narrowing of the carrier element towards the probe bearing side, so as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface,
• wherein the scan head comprises a mounting arrangement for enabling mounting of the probe chip onto the scan head, and wherein the mounting arrangement cooperates with the probe chip for fixing the probe chip in use.

A scanning probe microscopy device comprising:

• probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon, the probe chip including a carrier element having a probe bearing side, the probe bearing side being configured for bearing the probe to be extending therefrom as an integral or mounted part thereof, the carrier element further comprising a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device,
• wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat, wherein the longitudinal direction is defined as a direction parallel to or coinciding with a direction wherein the probe is to be extending from the probe bearing side, and wherein the lateral direction is transverse to the longitudinal direction and transverse to a thickness of the carrier element,
• wherein the carrier element, towards the probe bearing side thereof, is truncated in the lateral direction on each side of a longitudinal axis through a center of the carrier element, wherein the truncation is a narrowing of the carrier element towards the probe bearing side, so as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.