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US 2021/0263068 A1Published application
Scanning probe microscope and optical axis adjustment method in scanning probe microscope
AssigneeShimadzu Corporation
InventorKenji YAMASAKI
Life of this patent
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Abstract
It is intended to save time for adjusting a position of a detection unit. In a position adjustment process of a detector, a control device moves the detector obliquely with respect to a boundary line partitioning photodiodes on a plane on which the detector moves and moves the detector so that the position of the center of gravity of a spot of a laser beam and the center of a light-receiving surface coincide in response to the incident of at least a part of the laser beam on the light-receiving surface.
Claims7
A scanning probe microscope comprising:
- a cantilever;
- an irradiation unit configured to irradiate the cantilever with a laser beam;
- a detection unit including a light-receiving surface for receiving the laser beam reflected by the cantilever, the detection unit being configured to detect the laser beam incident on the light-receiving surface;
- a drive unit configured to move the detection unit along a plane intersecting with an optical axis of the laser beam incident on the light-receiving surface;
- and
- a control unit configured to control the drive unit,
- wherein the light-receiving surface is provided with a plurality of light-receiving areas, and
- wherein the control unit performs a first control for controlling the drive unit so that the detection unit is moved obliquely with respect to an axis parallel to a boundary line partitioning the plurality of light-receiving areas and a second control for adjusting so that a center of gravity of a spot of the laser beam on the light-receiving surface is brought to be positioned at a center of the light-receiving surface in response to receiving the laser beam by the light-receiving surface.
5 more elements
An optical axis adjustment method in a scanning probe microscope,
- wherein the scanning probe microscope comprising:
- a cantilever;
- an irradiation unit configured to irradiate the cantilever with a laser beam;
- and
- a detection unit including a light-receiving surface for receiving the laser beam reflected by the cantilever, the detection unit being configured to detect the laser beam incident on the light-receiving surface,
- wherein the light-receiving surface has a plurality of light-receiving areas,
- wherein the optical axis adjustment method comprises:
- a step of moving the detection unit obliquely with respect to an axis parallel to a boundary line partitioning the plurality of light-receiving surfaces on a plane intersecting with an optical axis of the laser beam incident on the light-receiving surface;
- and
- a step of adjusting such that a center of gravity of a spot of the laser beam on the light-receiving surface is brought to be positioned at a center of the light-receiving surface in response to receiving the laser beam by the light-receiving surface.
7 more elements
Dependencies are inferred from the claim text.