Back to results
US 2021/0242234 A1Published application
Semiconductor device and manufacturing method of the semiconductor device
AssigneeSK hynix Inc.
InventorNam Jae LEE
Life of this patent
Estimating the term…
Abstract
There are provided a semiconductor device and a manufacturing method thereof. The semiconductor device includes: a stack structure; a source structure; a channel structure penetrating the stack structure, the channel structure being connected to the source structure; and a first memory layer interposed between the channel structure and the stack structure. The source structure includes a first protrusion part protruding between the first memory layer and the channel structure.
Claims20
A semiconductor device comprising:
- a stack structure;
- a source structure including a first protrusion part protruding toward the stack structure;
- a channel structure penetrating the stack structure, the channel structure being connected to the source structure;
- a first tunnel insulating layer interposed between the channel structure and the stack structure;
- a first data storage layer interposed between the first tunnel insulating layer and the stack structure;
- and
- a first blocking layer interposed between the first data storage layer and the stack structure,
- wherein the first protrusion part is in contact with a bottom surface of the first tunnel insulating layer, a bottom surface of the first data storage layer, and a sidewall of the first blocking layer.
5 more elements
A semiconductor device comprising:
- a source structure;
- a stack structure;
- a channel structure penetrating the stack structure, the channel structure being connected to the source structure;
- and
- a first memory layer interposed between the channel structure and the stack structure,
- wherein the source structure includes a first protrusion part protruding between the first memory layer and the channel structure,
- wherein the first protrusion part has a stepped structure.
4 more elements
Dependencies are inferred from the claim text.