Electrostatic chuck and substrate fixing device
AssigneeShinko Electric Industries Co., Ltd.
InventorHiroyuki Kobayashi
Life of this patent
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Abstract
An electrostatic chuck is configured to adsorb and retain an object thereon. The electrostatic chuck includes: a base body on which the object is mounted; an electrostatic electrode that is provided in the base body; a plurality of heating elements that are provided in the base body; and a plurality of current control elements that are provided in the base body, and each of which is connected in series with a corresponding one of the heating elements. Each of operations of the current control elements is controlled in accordance with light radiated toward a corresponding one of the current control elements from an outside of the base body.
Claims9
An electrostatic chuck configured to adsorb and retain an object thereon, the electrostatic chuck comprising:
- a base body on which the object is mounted;
- an electrostatic electrode that is provided in the base body;
- a plurality of heating elements that are provided in the base body;
- and
- a plurality of current control elements that are provided in the base body, and each of which is connected in series with a corresponding one of the heating elements;
- wherein each of operations of the current control elements is controlled in accordance with light radiated toward a corresponding one of the current control elements from an outside of the base body.
Dependencies are inferred from the claim text.