US 2021/0242047 A1 · CERAMIC HEATER AND MANUFACTURING METHOD FOR SAME

Abstract

A ceramic heater includes a ceramic plate having a surface that serves as a wafer placement surface, resistance heating elements and that are embedded in the ceramic plate, a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate, a recess that is formed in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, and that has a size equal to a size of the within-shaft region, an elongate hole that extends from an opening formed in a side surface of the recess up to a predetermined terminal end position in an outer peripheral portion of the ceramic plate, and associated parts (such as terminals) that are disposed in the within-shaft region of the rear surface of the ceramic plate.

Claims13

Dependent claims

A ceramic heater comprising:

a ceramic plate having a surface that serves as a wafer placement surface;
a resistance heating element that is embedded in the ceramic plate;
a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate;
a recess that is formed in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft;
an elongate hole that extends from an opening formed in a side surface of the recess up to a predetermined terminal end position in an outer peripheral portion of the ceramic plate;
and
associated parts that are disposed in the within-shaft region of the rear surface of the ceramic plate and that include terminals of the resistance heating element.

4 more elements

Dependencies are inferred from the claim text.

Ceramic heater and manufacturing method for same

Life of this patent

Ceramic heater and manufacturing method for same

Life of this patent

Abstract

Claims13