Imprint apparatus, imprint method, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorToshihiko Nishida
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AssigneeCanon Kabushiki Kaisha
InventorToshihiko Nishida
Estimating the term…
The present invention provides an imprint apparatus that forms an imprint material on a substrate using a mold, comprising: a light irradiator configured to irradiate the substrate with light that changes a viscosity of the imprint material without curing the imprint material; a supplier configured to supply the imprint material onto the substrate; and a controller configured to, after controlling a supply process of supplying the imprint material to a plurality of shot regions in the substrate, control a forming process of forming the imprint material using the mold and curing the imprint material for each shot region, wherein the supply process includes first processing of sequentially supplying the imprint material to the plurality of shot regions by the supplier, and second processing of irradiating, with the light, a shot region to which the imprint material has been supplied.
An imprint apparatus that forms an imprint material on a substrate using a mold, the imprint apparatus comprising:
An imprint method of forming an imprint material on a substrate using a mold, the imprint method comprising:
Dependencies are inferred from the claim text.