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US 2021/0172064 A1Published application
Substrate processing apparatus
AssigneeASM IP Holding B.V.
InventorHyungChul Moon
Life of this patent
Estimating the term…
Abstract
Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, particularly, a gas supply device, for example, a shower head, by using a vortex tube. The cooling device may supply a cooling gas of a temperature lower than the temperature of the gas supply device heated to a high temperature, thereby easily controlling the temperature of the gas supply device.
Claims20
A cooling device comprising:
- a gas compressor configured to supply a compressed gas;
- a vortex tube having a compressed gas injection hole connected to the gas compressor via a first line, a hot air discharge hole, and a cold air discharge hole;
- at least one inlet connected to the cold air discharge hole of the vortex tube via a second line;
- and
- a fluid channel in which a cooling gas introduced through the at least one inlet circulates.
2 more elements
A substrate processing apparatus comprising:
- a chamber including an inner space surrounded by a top lid and an outer wall;
- at least one reactor disposed at the top lid and comprising a gas supply device;
- at least one substrate support disposed in the chamber to face the at least one reactor;
- a reaction space formed between the gas supply device and the substrate support;
- and
- at least one cooling device provided on an upper portion of the at least one reactor or on an upper portion of the gas supply device,
- the cooling device comprising at least one vortex tube having a compressed gas injection hole, a hot air discharge hole, and a cold air discharge hole,
- wherein the cooling device further comprises a fluid channel in which a cooling gas introduced through at least one inlet from the cold air discharge hole to cool the gas supply device circulates.
5 more elements
A substrate processing method comprising:
- compressing a gas by using a gas compressor;
- introducing the gas compressed by the gas compressor into a vortex tube;
- separating the compressed gas into cold air and hot air by using the vortex tube, and discharging the cold air through a cold air discharge hole and the hot air through a hot air discharge hole;
- and
- circulating the cold air discharged through the cold air discharge hole over an upper portion of the gas supply device.
2 more elements
Dependencies are inferred from the claim text.