Semiconductor storage device
AssigneeKioxia Corporation
InventorToshiyuki IWAMOTO
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AssigneeKioxia Corporation
InventorToshiyuki IWAMOTO
Estimating the term…
According to one embodiment, a semiconductor storage device includes: a single-crystal semiconductor substrate having a recessed surface; an under layer provided above the semiconductor substrate; a stacked body, provided over the under layer, that includes at least one conductive layer and at least one insulating layer alternately stacked on top of one another; a single-crystal semiconductor layer extending in a first direction perpendicular to the semiconductor substrate, penetrating the stacked body, and including a first end in contact with the recessed surface of the semiconductor substrate; and a memory film provided between the semiconductor layer and the at least one conductive layer. A crystal orientation of the semiconductor layer and a crystal orientation of the semiconductor substrate are the same.
A semiconductor storage device, comprising:
A semiconductor storage device, comprising:
Dependencies are inferred from the claim text.