Method and apparatus for unpacking semiconductor wafer container
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFu-Hsien LI, Chi-Feng TUNG, Chi Yuan CHU, Jen-Ti WANG, Hsiang Yin SHEN
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Abstract
An automated method of unpacking a container containing semiconductor wafers from a sealed bag is provided. The method includes inflating the bag with a gas using an automated gas dispenser. After inflating the bag, the bag is cut using an automated cutting device to expose the container, and the cut bag is removed from around the container.
Claims20
An apparatus for unpacking a container containing semiconductor wafers from a sealed bag, comprising:
- a platform for supporting the container;
- a nozzle for inserting gas into the sealed bag;
- a cutting device for cutting the sealed bag,
- wherein the cutting device is a laser;
- and
- a bag removing mechanism for removing the bag.
An apparatus for unpacking a container from a sealed bag, wherein the container is a front opening unified pod or a front opening shipping box containing 200 mm or 300 mm semiconductor wafers, comprising:
- a platform for supporting the container;
- a nozzle for inserting gas into the sealed bag;
- a cutting device for cutting the sealed bag;
- a bag removing mechanism for removing the bag;
- an inspection stage for inspecting the wafers in the container;
- a compactor for compacting the bag removed from the container;
- an information reader configured to read information about wafers stored in the container;
- and
- a computer configured to control the unpacking and to store the information about wafers stored in the container.
An apparatus for unpacking a container containing semiconductor wafers from a sealed bag, comprising:
- a platform for supporting the container;
- a nozzle for inserting gas into the sealed bag;
- a cutting device for cutting the sealed bag;
- and
- a bag removing mechanism for removing the bag,
- wherein the bag removing mechanism comprises:
- a frame;
- a bag securing mechanism attached to the frame;
- and
- a slide unit attached to the frame,
- wherein the bag securing mechanism and frame are configured to retract below a surface of the platform by an action of the slide unit.
Dependencies are inferred from the claim text.