Three-dimensional flash memory device including cell gate patterns having blocking barrier patterns and a method for manufacturing the same

A three-dimensional flash memory device comprising:

• a substrate;
• a cell gate pattern and a mold insulating layer stacked on the substrate,
• the mold insulating layer including an insulating material,
• the cell gate pattern including a cell gate electrode, a conductive inner cell gate barrier pattern, an insulating outer cell gate barrier pattern, and a blocking barrier pattern,
• the conductive inner cell gate barrier pattern surrounding an upper surface of the cell gate electrode, a lower surface of the cell gate electrode, and a side surface of the cell gate electrode,
• a first surface of the insulating outer cell gate barrier pattern conformably covering the conductive inner cell gate barrier pattern,
• an inner side surface of the blocking barrier pattern being on a second surface of the insulating outer cell gate barrier pattern that is opposite the first surface of the insulating outer cell gate barrier pattern,
• the inner side surface of the blocking barrier pattern having a concavo-convex shape including a recessed portion, and
• an outer side surface of the blocking barrier pattern having a convexly projecting outer side surface;
• and
• a vertical channel structure abutting side surfaces of the cell gate pattern and the mold insulating layer.

A three-dimensional flash memory device comprising:

• a substrate;
• a plurality of cell gate patterns and a plurality of mold insulating layers alternately stacked on the substrate,
• the plurality of mold insulating layers including an insulating material,
• each of the plurality of cell gate patterns including a cell gate electrode and a blocking barrier pattern surrounding one side surface of the cell gate electrode,
• an inner side surface of the blocking barrier pattern including an upper inner side surface, a middle inner side surface, and a lower inner side surface,
• the upper inner side surface and the lower inner side surface of the inner side surface of the blocking barrier pattern each having a concavo-convex shape;
• and
• a vertical channel structure in contact with side surfaces of the plurality of cell gate patterns and the plurality of mold insulating layers.