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US 2019/0377273 A1Published application
Lithography apparatus and method
AssigneeCarl Zeiss SMT GmbH
InventorsBjörn Liebaug, Franz-Josef Stickel, Jürgen Hofmann, Dietmar Dürr
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Abstract
A lithography machine includes an optical element, an interface coupled to the optical element, and a component which is separate from the interface. The interface is directly connected to the optical element. The optical element includes an engaging section. The component has a counter engaging section configured to engage with the engaging section of the optical element to connect the component form-fittingly and/or force-fittingly to the optical element.
Claims20
An apparatus, comprising:
- an optical element;
- an interface coupled to the optical element;
- and
- a component separate from the interface,
- wherein:
- the component is connected to the optical element directly in a positively locking manner and/or in a force-locking manner;
- the optical element comprises an engagement section;
- the component comprises a mating engagement section configured to engage into the engagement section to connect the component to the optical element in a positively locking manner and/or in a force-locking manner;
- and
- the apparatus is a lithography apparatus.
7 more elements
A method, comprising:
- a) providing an optical element comprising an engagement section, and an interface coupled to the optical element;
- b) providing a component separate from the interface, the component comprising a mating engagement section;
- and
- c) connecting the component to the optical element directly in a positively locking manner and/or in a force-locking manner,
- wherein the mating engagement section engages into the engagement section.
2 more elements
Dependencies are inferred from the claim text.