Imprint pressure roller device

An imprint pressure roller device, comprising:

• a chuck to mount a substrate thereon;
• a roller member having a shaft, opposite ends of the shaft being coupled to a respective bearing block, the roller member to rotate and press an imprint layer and a mold on the substrate while moving in a first direction, the roller member extending in a second direction perpendicular to the first direction;
• and
• a frame coupled to the bearing blocks to support the roller member and the respective bearing blocks, and to move the roller member,
• wherein each of the bearing blocks include:
• a coupling portion that is connected to the shaft;
• a core portion that extends from the coupling portion in a vertical direction;
• and
• first and second coils that completely surround sides of the core portion and are spaced apart from each other.

An imprint pressure roller device, comprising:

• a chuck on which a substrate is mounted;
• a roller member having a shaft, the roller member to press an imprint layer and a mold on the substrate while moving in a first direction, the roller member extending in a second direction perpendicular to the first direction;
• a bearing part coupled opposite ends of the roller member to allow rotation of the roller member;
• and
• a frame part coupled to the bearing part to restrict horizontal movement of the roller member while not restricting vertical movement of the roller member.