System and Method for Improved Chemical Etching
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsWenbin SUN, Yangbo JIANG, Ya Jun WANG, Li Xun Gu, Rong XU, Liang Hui WU
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsWenbin SUN, Yangbo JIANG, Ya Jun WANG, Li Xun Gu, Rong XU, Liang Hui WU
Estimating the term…
A chemical etching apparatus and methods of using are disclosed. An apparatus used for chemical etching includes a bath designed to hold a first liquid. A liquid supply pipe runs along a bottom portion of the bath. The liquid supply pipe has a first plurality of openings along a length of the liquid supply pipe along the bottom portion of the bath. A gas supply pipe runs along the bottom portion of the bath. The gas supply pipe has a second plurality of openings along a length of the gas supply pipe along the bottom portion of the bath. The liquid supply pipe introduces a second liquid into the first liquid via the first plurality of openings and the gas supply pipe introduces a gas into the first liquid via the second plurality of openings.
An apparatus used for chemical etching, comprising:
A chemical etching method, comprising:
Dependencies are inferred from the claim text.