Molding apparatus and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorTakahiro Sato
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AssigneeCanon Kabushiki Kaisha
InventorTakahiro Sato
Estimating the term…
The present invention provides a molding apparatus that performs a molding process for molding a composition on a substrate using a mold, including a holding unit configured to hold the substrate, and a control unit configured to control the molding process, wherein the control unit starts a process for pressing the mold against the composition on the substrate while the substrate is held by the holding unit with a first holding force, causes the holding unit to hold the substrate with a second holding force smaller than the first holding force after the process is started, and maintains the holding of the substrate by the holding unit with the second holding force until completion of filling of the composition on the substrate into the mold.
A molding apparatus that performs a molding process for molding a composition on a substrate using a mold, comprising:
A method of manufacturing an article, comprising:
Dependencies are inferred from the claim text.