Semiconductor wafer having bevel portion
AssigneeSamsung Electronics Co., Ltd.
InventorsYeon-sook KIM, In-ji LEE, Doek-gil KO, Woo-seung JUNG
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AssigneeSamsung Electronics Co., Ltd.
InventorsYeon-sook KIM, In-ji LEE, Doek-gil KO, Woo-seung JUNG
Estimating the term…
A semiconductor wafer is provided. The semiconductor wafer includes a wafer body including a first surface and a second surface opposite the first surface; and a bevel portion disposed along an outer circumference of the wafer body and including an inclined surface, an outermost point, a first surface end portion connecting the bevel portion to the first surface and a second surface end portion connecting the bevel portion to the second surface. A first bevel angle between a first tangential direction of the inclined surface and the first surface corresponds to a capillary force of a fluid on the first surface, and a first bevel length between the first surface end portion and the outermost point along a first direction substantially parallel to the first surface corresponds to a first surface flatness.
A semiconductor wafer comprising:
A semiconductor wafer comprising:
A semiconductor wafer comprising:
Dependencies are inferred from the claim text.