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US 2019/0195910 A1Published application
Material Property Measurements Using Multiple Frequency Atomic Force Microscopy
AssigneesOxford Instruments PLC, Oxford Instruments AFM, Inc
InventorsRoger Proksch, Roger Callahan
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Abstract
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
Claims5
An atomic force microscope which processes a sample, comprising:
- an atomic force microscope cantilever which has a probe tip which moves relative to a surface of the sample;
- a controller, controlling said cantilever by creating relative movement between the probe tip of the cantilever and the sample and measuring values used to control said cantilever, said controller using both first and second frequencies to cause said relative movement of the cantilever, where the first and second frequencies are different frequencies;
- a mechanical actuator, driven by said controller for moving said cantilever, said mechanical actuator driven by said first frequency;
- a magnetic field generator, creating a magnetic field at the sample, said controller using said second frequency to vary the magnetic field at the sample;
- said controller using said first and second frequencies and a measured value indicative of said relative movement, to provide information indicative of a surface of the sample.
2 more elements
Dependencies are inferred from the claim text.