Substrate measurement recipe design of, or for, a target including a latent image

A computer program product comprising a non-transitory computer readable medium having instructions recorded thereon, the instructions when executed by a computer system, configured to cause the computer system to at least:

• compute, in accordance with one or more parameters of a substrate measurement recipe, measurement with a latent image of a target and measurement with a post-development image corresponding to the latent image, to evaluate a characteristic determined from the computed measurement with the latent image of the target and determined from the computed measurement with the post-development image corresponding to the latent image;
• and
• adjust the one or more parameters of the substrate measurement recipe and re-perform the computing, until a certain termination condition is satisfied with respect to the characteristic.