Vapor deposition apparatus

A method of manufacturing a display device, the method comprising:

• locating a substrate on which an organic light emitting device is provided below a deposition unit;
• and
• forming an encapsulation layer on the substrate, wherein the encapsulation layer comprises an inorganic layer and an organic layer;
• wherein forming the inorganic layer comprising:
• injecting a first raw material toward the substrate by first nozzle of the deposition unit to form an adsorption layer comprising a chemical adsorption layer and a physical adsorption layer on the substrate;
• injecting a purge gas toward the substrate by first purge nozzle of the deposition unit to separate the physical adsorption layer from the substrate;
• and
• injecting a second raw material toward the substrate by second nozzle of the deposition unit, the second raw material react with the chemical adsorption layer to form a thin film on the substrate;
• wherein the second raw material supplied to the second nozzle has radical form.