Quartz upper and lower domes

A lamphead assembly, comprising:

• a plurality of lamp assemblies;
• a lamphead having a plurality of lamphead positions for securing the plurality of lamp assemblies;
• a plurality of flexible standoffs attached to the plurality of lamp assemblies, each flexible standoff comprising:
• a socket disposed at a first end of the flexible standoff;
• and
• an adaptor coupled to the socket, the adapter extending through the flexible standoff from the first end of the flexible standoff to a second end of the flexible standoff opposing the first end;
• and
• a power distribution board having one or more connection slots, the one or more connection slots connecting to one or more lamp assemblies through the plurality of flexible standoffs.

An apparatus for processing a substrate, comprising:

• a processing chamber, comprising:
• an upper dome;
• a lower dome disposed opposing the upper dome;
• a base ring disposed between the upper dome and the lower dome, the upper dome, the base ring and the lower dome defining a processing region of the processing chamber;
• and
• one or more gas inlets disposed at a sidewall of the base ring;
• a substrate support disposed within the processing region;
• a lamphead positioned proximate to the lower dome;
• a plurality of lamp assemblies, each lamp assembly comprising:
• a radiation source;
• and
• a lamp base connecting to the radiation source;
• a plurality of flexible standoffs attached to the plurality of lamp assemblies, each flexible standoff comprising:
• a socket;
• and
• an adaptor coupled to the socket;
• and
• a power distribution board comprising one or more connection slots, the one or more connection slots connecting to the one or more lamp assemblies through the plurality of flexible standoffs.