Substrate storing container
AssigneeMiraial Co., Ltd.
InventorsYuta KANAMORI, Chiaki MATSUTORI, Minoru TOMITA, Kazunori OZAWA
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AssigneeMiraial Co., Ltd.
InventorsYuta KANAMORI, Chiaki MATSUTORI, Minoru TOMITA, Kazunori OZAWA
Estimating the term…
A substrate storing container includes a container main body, a lid body, and a lateral substrate support portion. The lateral substrate support portion of the substrate storing container includes substrate contact portions touching a substrate when supporting an edge portion of the substrate, and contact portion support portions supporting the substrate contact portions. The substrate contact portions are made of a material having a heat-resisting property with respect to temperature of the substrate touching the substrate contact portions. The contact portion support portions are made of a material having a lower heat-resisting property than that of the substrate contact portions and having a lower coefficient of moisture absorption than that of the substrate contact portions.
A substrate storing container comprising:
Dependencies are inferred from the claim text.