Mask plate, exposure system and exposure method
AssigneesBoe Technology Group Co., Ltd., Beijing Boe Display Technology Co., Ltd.
InventorsGuojing MA, Changjian XU, Dan WANG, Jinyu REN
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Abstract
A mask plate, an exposure system and an exposure method are disclosed. The mask plate includes a control unit (10) and a liquid crystal cell (20), wherein the control unit (10) is electrically connected to the liquid crystal cell (20) and configured to control the liquid crystal cell (20) to render a mask pattern. The mask plate can fulfill the requirements for various mask patterns, which not only save the manufacturing cost, but also simplifies the process operation.
Claims18
A mask plate, comprising a control unit and a liquid crystal cell, wherein the control unit is electrically connected to the liquid crystal cell and configured to control the liquid crystal cell to render a mask pattern.
Dependencies are inferred from the claim text.