ALD Coating System and Method for Operating an ALD Coating System

A method for operating an ALD coating system for growing at least one layer on a substrate, the method comprising:

• providing an organometallic starting material in a storage container;
• flowing a partial amount of the organometallic starting material into an intermediate container;
• and
• heating the partial amount of the organometallic starting material by a device for heating up the organometallic starting material, so that a pressure of the partial amount of the organometallic starting material is greater than a pressure of the organometallic starting material in the storage container occurs,
• wherein, before heating the partial amount of the organometallic starting material, lowering a temperature of the intermediate container by a device for cooling the intermediate container, wherein the device for cooling lowers a temperature of the intermediate container below a temperature of the storage container.

A method for operating an ALD coating system for growing at least one layer on a substrate, the method comprising:

• providing an organometallic starting material in a storage container;
• lowering a temperature of an intermediate container by cooling the intermediate container so that a temperature of the intermediate container is below a temperature of the storage container;
• after lowering the temperature, flowing a partial amount of the organometallic starting material into the intermediate container;
• heating the partial amount of the organometallic starting material in the intermediate container so that a pressure of the partial amount of the organometallic starting material is constant over time and/or is greater than a pressure of the organometallic starting material in the storage container;
• after heating the partial amount, flowing a portion of the partial amount of the organometallic starting material as a gas into a process chamber;
• and
• after flowing the portion into the process chamber, flowing the the organometallic starting material that remains in the intermediate container into a collecting chamber.