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AssigneeInternational Business Machines Corporation
InventorsStefan Harrer, Stephen M. Rossnagel, Philip S. Waggoner
Estimating the term…
Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.
A method comprising:
A method comprising:
A computer program product for controlling the fabrication of a nanofluidic device including a nanofluidic passage in a substrate, the nanofluidic passage comprising an electrically conductive surface and containing an electrolyte:
A method comprising:
Dependencies are inferred from the claim text.