Door opening and closing apparatus, transfer apparatus, and storage container opening method
AssigneeSinfonia Technology Co., Ltd.
InventorTakaaki Nakano
Life of this patent
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AssigneeSinfonia Technology Co., Ltd.
InventorTakaaki Nakano
Estimating the term…
A door opening and closing apparatus includes: a frame that structures part of a wall surface of a transfer room and is provided with an opening for opening the transfer room; a door part capable of opening and closing the opening: a placing pedestal on which a storage container can be placed; a chamber provided at a position on the transfer room side so as to face the opening, and having an inner space to be subjected to a purge process with an environmental gas; and a pressure adjusting part causing the inner space of the chamber and the inner space of the storage container to communicate with each other using a route other than the opening. The door opening and closing apparatus can be applied to a wafer transfer apparatus or the like.
A door opening and closing apparatus provided adjacent to a transfer room for putting in and taking out a transfer target object to and from between a storage container capable of storing the transfer target object in an inner space thereof and the transfer room, the door opening and closing apparatus comprising:
A transfer apparatus for transferring a transfer target object, the transfer apparatus comprising:
Dependencies are inferred from the claim text.